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材料/CMP Slurry
Applications
Semiconductors
STI, ILD/IMD process
MEMS device polishing
Benefits
High selectivity
Low scratch
Low defect
Customized
Packaging
10kg & 200kg
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Semiconductors
STI, ILD/IMD process
MEMS device polishing
High selectivity
Low scratch
Low defect
Customized
10kg & 200kg