Precursors

Products

Si, Zr, Ti and HF precursors

- BDEAS

- 3DMAS

- DIPAS

- TDMAZr

- TDMAHf

- TEMAZr

- TEMAHf

Customized precursors

Synthesis, purification, filling and packaging

Multiple size reactors to accomadate R&D, pilot and scaled productions

Joint development & OEM opportunities